Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6589009 | Turbo-molecular pump | Atsushi Shiokawa, Matsutaro Miyamoto, Hiroyuki Kawasaki, Hiroshi Sobukawa | 2003-07-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6589009 | Turbo-molecular pump | Atsushi Shiokawa, Matsutaro Miyamoto, Hiroyuki Kawasaki, Hiroshi Sobukawa | 2003-07-08 |