Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6561324 | Drive unit including a motor and a retarder | Jurgen Friedrich, Klaus Vogelsang, Peter Heilinger | 2003-05-13 |
| 6555832 | Determining beam alignment in ion implantation using Rutherford Back Scattering | Geoffrey Ryding, Theodore H. Smick, John Ruffell, Marvin Farley | 2003-04-29 |