Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6555832 | Determining beam alignment in ion implantation using Rutherford Back Scattering | Theodore H. Smick, John Ruffell, Marvin Farley, Peter Rose | 2003-04-29 |
| 6515288 | Vacuum bearing structure and a method of supporting a movable member | Theodore H. Smick, Marvin Farley, Takao Sakase | 2003-02-04 |