CH

Claudia Hartmann

CY Cymer: 1 patents #32 of 75Top 45%
📍 Mering, DE: #1 of 9 inventorsTop 15%
Overall (2003): #246,226 of 273,478Top 95%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6618421 High repetition rate gas discharge laser with precise pulse timing control Palash P. Das, Jennan Yu, Stuart L. Anderson, Helmut Schillinger, Tobias Pflanz +4 more 2003-09-09