Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6606883 | Method for producing fused silica and doped fused silica glass | Nikki Russo, Michael H. Wasilewski | 2003-08-19 |
| 6576380 | Extreme ultraviolet soft x-ray projection lithographic method and mask devices | Claude L. Davis, Jr., Robert Sabia, Harrie J. Stevens | 2003-06-10 |
| 6548142 | Silica glass honeycomb structure from silica soot extrusion | Gitimoy Kar, John Forrest Wight, Jr., C. Charles Yu | 2003-04-15 |
| 6542224 | Silica-based light-weight EUV lithography stages | Bradford Ackerman, Bradley Frederick Bowden, Claude L. Davis, Jr. | 2003-04-01 |