Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6576380 | Extreme ultraviolet soft x-ray projection lithographic method and mask devices | Kenneth Edward Hrdina, Robert Sabia, Harrie J. Stevens | 2003-06-10 |
| 6542224 | Silica-based light-weight EUV lithography stages | Bradford Ackerman, Bradley Frederick Bowden, Kenneth Edward Hrdina | 2003-04-01 |