Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6640433 | Method for forming a micro-pattern | Hiroshi Matsuda, Kiyoshi Takimoto | 2003-11-04 |
| 6632593 | Pattern-forming method using photomask, and pattern-forming apparatus | Takako Yamaguchi | 2003-10-14 |
| 6628392 | Light modulation apparatus and optical switch, movement detecting device and distance measuring device, alignment device and semiconductor aligner, and processes thereof | Yasuhiro Shimada, Junichi Seki, Takako Yamaguchi, Yasuhisa Inao | 2003-09-30 |
| 6559926 | Pattern forming apparatus and pattern forming method | Takako Yamaguchi | 2003-05-06 |