Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6628392 | Light modulation apparatus and optical switch, movement detecting device and distance measuring device, alignment device and semiconductor aligner, and processes thereof | Ryo Kuroda, Yasuhiro Shimada, Takako Yamaguchi, Yasuhisa Inao | 2003-09-30 |