Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660639 | Method of fabricating a copper damascene structure | Yuzhuo Li | 2003-12-09 |
| 6656241 | Silica-based slurry | Stuart D. Hellring, Colin P. McCann, Charles F. Kahle, II, Yuzhuo Li | 2003-12-02 |
| 6508953 | Slurry for chemical-mechanical polishing copper damascene structures | Yuzhuo Li | 2003-01-21 |