Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660639 | Method of fabricating a copper damascene structure | Jason Keleher | 2003-12-09 |
| 6656241 | Silica-based slurry | Stuart D. Hellring, Colin P. McCann, Charles F. Kahle, II, Jason Keleher | 2003-12-02 |
| 6620215 | Abrasive composition containing organic particles for chemical mechanical planarization | Guomin Bian, Kwok Tang, Joe Zunzi Zhao, John Westbrook, Yong Lin +1 more | 2003-09-16 |
| 6508953 | Slurry for chemical-mechanical polishing copper damascene structures | Jason Keleher | 2003-01-21 |