Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6579374 | Apparatus for fabrication of thin films | Niklas Bondestam, Janne Kesala, Pekka Soininen | 2003-06-17 |
| 6562140 | Apparatus for fabrication of thin films | Niklas Bondestam, Janne Kesala, Pekka Soininen | 2003-05-13 |