Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6630030 | Method and apparatus for growing thin films | Tuomo Suntola, Pekka Soininen | 2003-10-07 |
| 6579374 | Apparatus for fabrication of thin films | Janne Kesala, Leif Keto, Pekka Soininen | 2003-06-17 |
| 6562140 | Apparatus for fabrication of thin films | Janne Kesala, Leif Keto, Pekka Soininen | 2003-05-13 |