Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6606739 | Scaling method for a digital photolithography system | Takashi Kanatake, Akira Ishikawa | 2003-08-12 |
| 6552779 | Flying image of a maskless exposure system | — | 2003-04-22 |
| 6537738 | System and method for making smooth diagonal components with a digital photolithography system | Takashi Kanatake | 2003-03-25 |
| 6529262 | System and method for performing lithography on a substrate | Takashi Kanatake | 2003-03-04 |
| 6512625 | Light modulation device and system | Kin F. Chan, Dong Sim | 2003-01-28 |
| 6509955 | Lens system for maskless photolithography | Takashi Kanatake | 2003-01-21 |