Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663325 | Transport system for spherical objects and method of using the transport system | Shuho Kai, Tashirou Arai, Kiyoshi Horii | 2003-12-16 |
| 6606739 | Scaling method for a digital photolithography system | Wenhui Mei, Akira Ishikawa | 2003-08-12 |
| 6537738 | System and method for making smooth diagonal components with a digital photolithography system | Wenhui Mei | 2003-03-25 |
| 6529262 | System and method for performing lithography on a substrate | Wenhui Mei | 2003-03-04 |
| 6509955 | Lens system for maskless photolithography | Wenhui Mei | 2003-01-21 |