Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6610150 | Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system | Richard Savage, Frank S. Menagh, Helder R. Carvalheira, Philip A. Troiani, Dan Cossentine +1 more | 2003-08-26 |
| 6544345 | Method and system for in-situ cleaning of semiconductor manufacturing equipment using combination chemistries | Robert H. Chatham, III, Nitin K. Ingle, Zheng Yuan | 2003-04-08 |