Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6610150 | Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system | Richard Savage, Frank S. Menagh, Helder R. Carvalheira, Philip A. Troiani, Eric R. Vaughan +1 more | 2003-08-26 |