Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6650399 | Lithographic projection apparatus, a grating module, a sensor module, a method of measuring wave front aberrations | Johannes Jacobus Matheus Baselmans, Hans Van Der Laan, Robert Wilhelm Willekers, Wilhelmus Petrus De Boeij, Marcus Adrianus Van De Kerkhof | 2003-11-18 |
| 6646729 | Method of measuring aberration in an optical imaging system | Hans Van Der Laan | 2003-11-11 |