Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6631692 | Plasma CVD film-forming device | Nobuo Matsuki | 2003-10-14 |
| 6559520 | Siloxan polymer film on semiconductor substrate | Nobuo Matsuki, Lee Jea Sik, Satoshi Takahashi | 2003-05-06 |
| 6514880 | Siloxan polymer film on semiconductor substrate and method for forming same | Nobuo Matsuki, Lee Jea Sik, Satoshi Takahashi | 2003-02-04 |