Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653719 | Silicone polymer insulation film on semiconductor substrate | — | 2003-11-25 |
| 6631692 | Plasma CVD film-forming device | Yoshinori Morisada | 2003-10-14 |
| 6602800 | Apparatus for forming thin film on semiconductor substrate by plasma reaction | — | 2003-08-05 |
| 6559520 | Siloxan polymer film on semiconductor substrate | Lee Jea Sik, Yoshinori Morisada, Satoshi Takahashi | 2003-05-06 |
| 6537928 | Apparatus and method for forming low dielectric constant film | Seijiro Umemoto, Yasuyoshi Hyodo | 2003-03-25 |
| 6514880 | Siloxan polymer film on semiconductor substrate and method for forming same | Lee Jea Sik, Yoshinori Morisada, Satoshi Takahashi | 2003-02-04 |