Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6559026 | Trench fill with HDP-CVD process including coupled high power density plasma deposition | Kent Rossman, Zhuang Li | 2003-05-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6559026 | Trench fill with HDP-CVD process including coupled high power density plasma deposition | Kent Rossman, Zhuang Li | 2003-05-06 |