Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635578 | Method of operating a dual chamber reactor with neutral density decoupled from ion density | Songlin Xu, John Holland | 2003-10-21 |
| 6544896 | Method for enhancing etching of TiSix | Songlin Xu, Takakazu Kusuki | 2003-04-08 |