Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6524165 | Method and apparatus for measuring substrate layer thickness during chemical mechanical polishing | Andreas Norbert Wiswesser, Boguslaw A. Swedek | 2003-02-25 |
WS
Walter Schoenleber
Overall (2003): #94,566 of 273,478Top 35%
1
Patents 2003