Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6562720 | Apparatus and method for surface finishing a silicon film | Anna Lena Thilderkvist, Paul B. Comita, Lance A. Scudder | 2003-05-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6562720 | Apparatus and method for surface finishing a silicon film | Anna Lena Thilderkvist, Paul B. Comita, Lance A. Scudder | 2003-05-13 |