Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6562720 | Apparatus and method for surface finishing a silicon film | Anna Lena Thilderkvist, Paul B. Comita, Norma Riley | 2003-05-13 |
| 6544033 | Wafer carrier | Lori D. Washington, Lori Ann Callaghan, Bradley M. Curelop | 2003-04-08 |