Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6566897 | Voltage contrast method and apparatus for semiconductor inspection using low voltage particle beam | Kenichi Kanai | 2003-05-20 |
| 6539106 | Feature-based defect detection | Harry Gallarda, Adam Rhoads, Christopher G. Talbot | 2003-03-25 |
| 6509750 | Apparatus for detecting defects in patterned substrates | Christopher G. Talbot | 2003-01-21 |
| 6504393 | Methods and apparatus for testing semiconductor and integrated circuit structures | Mariel Stoops, Christopher G. Talbot | 2003-01-07 |