Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6607640 | Temperature control of a substrate | Darryl Angelo, Tse-Yong Yao, Peijun Ding | 2003-08-19 |
| 6580057 | Enhanced cooling IMP coil support | Richard Hong, James Tsung, Gunnar Vatvedt, Peijun Ding | 2003-06-17 |