Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6528332 | Method and system for reducing polymer build up during plasma etch of an intermetal dielectric | Mehrdad Mahanpour, Jose Hulog | 2003-03-04 |
| 6517666 | Automatic decapsulation system utilizing an integrated spacer/protection plate | Xia Li, Jose Hulog | 2003-02-11 |