Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6528332 | Method and system for reducing polymer build up during plasma etch of an intermetal dielectric | Mohammad Massoodi, Jose Hulog | 2003-03-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6528332 | Method and system for reducing polymer build up during plasma etch of an intermetal dielectric | Mohammad Massoodi, Jose Hulog | 2003-03-04 |