Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6552209 | Preparation of metal imino/amino complexes for metal oxide and metal nitride thin films | Xinjian Lei | 2003-04-22 |
| 6537613 | Process for metal metalloid oxides and nitrides with compositional gradients | Yoshihide Senzaki, Arthur Kenneth Hochberg | 2003-03-25 |
| 6503561 | Liquid precursor mixtures for deposition of multicomponent metal containing materials | Yoshihide Senzaki, David A. Roberts, Arthur Kenneth Hochberg | 2003-01-07 |