Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6534666 | Use of water and acidic water to purify liquid MOCVD precursors | Robert Sam Zorich, James Richard Thurmond | 2003-03-18 |
| 6526824 | High purity chemical container with external level sensor and liquid sump | Geoffrey L. Chase, John Eric Baker, Lee Senecal, Robert Sam Zorich | 2003-03-04 |
| 6503561 | Liquid precursor mixtures for deposition of multicomponent metal containing materials | Yoshihide Senzaki, John Anthony Thomas Norman, Arthur Kenneth Hochberg | 2003-01-07 |