Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620565 | Electron beam lithography apparatus focused through spherical aberration introduction | Victor Katsap, Eric Munro, Warren K. Waskiewicz, Xieqing Zhu | 2003-09-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620565 | Electron beam lithography apparatus focused through spherical aberration introduction | Victor Katsap, Eric Munro, Warren K. Waskiewicz, Xieqing Zhu | 2003-09-16 |