Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479166 | Large area polysilicon films with predetermined stress characteristics and method for producing same | Arthur H. Heuer, Harold Kahn, Stephen M. Phillips | 2002-11-12 |
| 6465045 | Low stress polysilicon film and method for producing same | Arthur H. Heuer, Harold Kahn | 2002-10-15 |