Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479166 | Large area polysilicon films with predetermined stress characteristics and method for producing same | Arthur H. Heuer, Harold Kahn, Jie Yang | 2002-11-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479166 | Large area polysilicon films with predetermined stress characteristics and method for producing same | Arthur H. Heuer, Harold Kahn, Jie Yang | 2002-11-12 |