Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6452274 | Semiconductor device having a low dielectric layer as an interlayer insulating layer | Hajime Nakayama | 2002-09-17 |
| 6407011 | Low dielectric constant insulating films with laminated carbon-containing silicon oxide and organic layers | Koichi Ikeda, Masanaga Fukasawa, Hideyuki Kito | 2002-06-18 |
| 6383907 | Process for fabricating a semiconductor device | Koichi Ikeda, Hideyuki Kito | 2002-05-07 |