Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6407011 | Low dielectric constant insulating films with laminated carbon-containing silicon oxide and organic layers | Koichi Ikeda, Hideyuki Kito, Toshiaki Hasegawa | 2002-06-18 |