Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6426272 | Method to reduce STI HDP-CVD USG deposition induced defects | Chu-Yun Fu | 2002-07-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6426272 | Method to reduce STI HDP-CVD USG deposition induced defects | Chu-Yun Fu | 2002-07-30 |