Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6447651 | High-permeability magnetic shield for improved process uniformity in nonmagnetized plasma process chambers | Tetsuya Ishikawa, Kaveh Niazi, Tsutomu Tanaka, Canfeng Lai | 2002-09-10 |