Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475356 | Method and apparatus for improving sidewall coverage during sputtering in a chamber having an inductively coupled plasma | Ken Ngan, Seshadri Ramaswami | 2002-11-05 |
SH
Simon Wing-Lok Hui
Overall (2002): #116,047 of 266,432Top 45%
1
Patents 2002