Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444028 | Charging material and holding system for the charging material | Axel Frauenknecht, Viktor Beer | 2002-09-03 |
| 6375011 | Vibrating conveyor and method for conveying silicon fragments | Dirk Flottmann, Franz Koppl, Friedrich Steudten | 2002-04-23 |
| 6360755 | Method for processing semiconductor material | Dirk Flottmann | 2002-03-26 |
| 6350313 | Method of producing a polycrystalline silicon rod | Heinz Kraus, Peter Niedermeier | 2002-02-26 |