Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6375011 | Vibrating conveyor and method for conveying silicon fragments | Franz Koppl, Matthaus Schantz, Friedrich Steudten | 2002-04-23 |
| 6360755 | Method for processing semiconductor material | Matthaus Schantz | 2002-03-26 |