Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6372658 | Reducing contamination induced scumming, for semiconductor device, by ashing | David Ziger, Christopher Robinett | 2002-04-16 |
| 6360754 | Method of protecting quartz hardware from etching during plasma-enhanced cleaning of a semiconductor processing chamber | Wing Kei Au | 2002-03-26 |