Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451698 | System and method for preventing electrochemical erosion by depositing a protective film | Albert H. Liu | 2002-09-17 |
| 6360754 | Method of protecting quartz hardware from etching during plasma-enhanced cleaning of a semiconductor processing chamber | Ramiro Solis | 2002-03-26 |