Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6476247 | Processes for the preparation of organoluthenium compounds useful for thin film formation by CVD | Jun-ichi Taniuchi, Masayuki Saito | 2002-11-05 |
| 6465669 | Organometallic compounds for use in metal-organic vapor-phase epitaxy | — | 2002-10-15 |
| 6420582 | Organometallic compounds for chemical vapor deposition and their preparing processes, and processes for chemical vapor deposition of precious-metal films and precious-metal compound films | — | 2002-07-16 |