Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6476247 | Processes for the preparation of organoluthenium compounds useful for thin film formation by CVD | Koji Okamoto, Masayuki Saito | 2002-11-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6476247 | Processes for the preparation of organoluthenium compounds useful for thin film formation by CVD | Koji Okamoto, Masayuki Saito | 2002-11-05 |