Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488570 | Method relating to a polishing system having a multi-phase polishing layer | David B. James, William D. Budinger, John V. H. Roberts, Nina G. Chechik, Richard M. Levering, Jr. +1 more | 2002-12-03 |
| 6471571 | Substrate supporting carrier pad | — | 2002-10-29 |
| 6375559 | Polishing system having a multi-phase polishing substrate and methods relating thereto | David B. James, William D. Budinger, John V. H. Roberts, Nina G. Chechik, Richard M. Levering, Jr. +1 more | 2002-04-23 |
| 6337281 | Fixed abrasive polishing system for the manufacture of semiconductor devices, memory disks and the like | David B. James, William D. Budinger, John V. H. Roberts, Nina G. Chechik, Richard M. Levering, Jr. +1 more | 2002-01-08 |