Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488570 | Method relating to a polishing system having a multi-phase polishing layer | David B. James, John V. H. Roberts, Michael R. Oliver, Nina G. Chechik, Richard M. Levering, Jr. +1 more | 2002-12-03 |
| 6439989 | Polymeric polishing pad having continuously regenerated work surface | Heinz Reinhardt, John V. H. Roberts, Harry McClain, Elmer Jensen | 2002-08-27 |
| 6375559 | Polishing system having a multi-phase polishing substrate and methods relating thereto | David B. James, John V. H. Roberts, Michael R. Oliver, Nina G. Chechik, Richard M. Levering, Jr. +1 more | 2002-04-23 |
| 6375694 | Polishing slurry compositions capable of providing multi-modal particle packing | John V. H. Roberts, Lee Melbourne Cook | 2002-04-23 |
| 6337281 | Fixed abrasive polishing system for the manufacture of semiconductor devices, memory disks and the like | David B. James, John V. H. Roberts, Michael R. Oliver, Nina G. Chechik, Richard M. Levering, Jr. +1 more | 2002-01-08 |