Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492625 | Apparatus and method for controlling temperature uniformity of substrates | Vadim Boguslavskiy, Ameesh Patel, Jeffrey C. Ramer | 2002-12-10 |
| 6398406 | Temperature determination using pyrometry | William G. Breiland, Vadim Boguslavskiy | 2002-06-04 |
| 6368404 | Induction heated chemical vapor deposition reactor | Paul Thomas Fabiano, David Russell Voorhees, Scott Beherrell | 2002-04-09 |
| 6349270 | Method and apparatus for measuring the temperature of objects on a fast moving holder | Vadim Boguslavskiy, Ameesh Patel, Jeffrey C. Ramer | 2002-02-19 |