Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492625 | Apparatus and method for controlling temperature uniformity of substrates | Vadim Boguslavskiy, Alexander I. Gurary, Ameesh Patel | 2002-12-10 |
| 6349270 | Method and apparatus for measuring the temperature of objects on a fast moving holder | Alexander I. Gurary, Vadim Boguslavskiy, Ameesh Patel | 2002-02-19 |