Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458430 | Pretreatment process for plasma immersion ion implantation | James D. Bernstein, Alec S. Denholm | 2002-10-01 |
| 6429139 | Serial wafer handling mechanism | Kevin T. Ryan, Frank Sinclair, Ernest E. Allen, Roger B. Fish | 2002-08-06 |
| 6347919 | Wafer processing chamber having separable upper and lower halves | Kevin T. Ryan, Frank Sinclair, Ernest E. Allen, Roger B. Fish | 2002-02-19 |