Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6429139 | Serial wafer handling mechanism | Kevin T. Ryan, Peter L. Kellerman, Frank Sinclair, Roger B. Fish | 2002-08-06 |
| 6347919 | Wafer processing chamber having separable upper and lower halves | Kevin T. Ryan, Peter L. Kellerman, Frank Sinclair, Roger B. Fish | 2002-02-19 |